Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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A 100 mA class ion implanter for large scale production of buried oxide SOI wafers
S. MoffattVolume:
21
Year:
1987
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(87)90837-8
File:
PDF, 1.95 MB
english, 1987