Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Production high energy ion implanters using radio frequency acceleration
H.F. Glavish, D. Bernhardt, P. Boisseau, B. Libby, G. Simcox, A.S. DenholmVolume:
21
Year:
1987
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(87)90839-1
File:
PDF, 417 KB
english, 1987