Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Acceleration column for a high current oxygen implanter
R.E. Kaim, D.H. Douglas-Hamilton, John P. RuffellVolume:
21
Year:
1987
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(87)90850-0
File:
PDF, 217 KB
english, 1987