Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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The precision implant 9000, a new concept in ion implantation systems
L.S. Steen, J.Michael Hall, D. Aitken, F.G. Plumb, M.T. Wauk, N. Bright, C. Pruitt, L. RobinsonVolume:
21
Year:
1987
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(87)90852-4
File:
PDF, 1.84 MB
english, 1987