Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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A new computer designed faraday system for high current ion implantation systems
R. Outcault, C. McKenna, T. Robertson, L. BiondoVolume:
21
Year:
1987
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(87)90856-1
File:
PDF, 347 KB
english, 1987