Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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A study of wafer and device charging during high current ion implantation
Vijay K. Basra, Charles M. McKenna, Susan B. FelchVolume:
21
Year:
1987
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(87)90857-3
File:
PDF, 550 KB
english, 1987