Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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A method of surface charge neutralization during ion implantation
M.L. King, S.E. Sampayan, B.H. HightVolume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90864-0
File:
PDF, 1.60 MB
english, 1987