Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
![](/img/cover-not-exists.png)
Critical aspects of high energy implants for CMOS technology: Channeling effects and masking problems
P. Spinelli, A.M. Cartier, M. BruelVolume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90876-7
File:
PDF, 230 KB
english, 1987