Critical aspects of high energy implants for CMOS...

Critical aspects of high energy implants for CMOS technology: Channeling effects and masking problems

P. Spinelli, A.M. Cartier, M. Bruel
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Volume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90876-7
File:
PDF, 230 KB
english, 1987
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