Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
![](/img/cover-not-exists.png)
Range distributions of MeV implants in silicon II: A comparison of SIMS and spreading resistance profiles of B, P and Ga
David C. Ingram, John A. Baker, David A. Walsh, Elizabeth StrathmanVolume:
21
Year:
1987
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(87)90878-0
File:
PDF, 267 KB
english, 1987