Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Deep p-type layer formation using Al+ implantation and diffusion into Si
Masakatsu Yoshida, Atsutomo Tohi, Morio InoueVolume:
21
Year:
1987
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(87)90884-6
File:
PDF, 157 KB
english, 1987