Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Use of ultra-low-energy BF2+ implantation and rapid annealing to avoid channeling effects in shallow junction formation
S.B. Felch, R.A. PowellVolume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90885-8
File:
PDF, 176 KB
english, 1987