Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
The effect of implant species on defect anneal kinetics part I: Silicon and phosphorus implantation
S. Prussin, Kevin S. JonesVolume:
21
Year:
1987
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(87)90888-3
File:
PDF, 5.23 MB
english, 1987