Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Monitoring low dose single implanted layers with four-point probe technology
James T.C. ChenVolume:
21
Year:
1987
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(87)90897-4
File:
PDF, 206 KB
english, 1987