Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
Sheet resistance monitoring of low dose implants using the double implant technique
A.K. Smith, W.H. Johnson, W.A. Keenan, Michael Rigik, Rob KleppingerVolume:
21
Year:
1987
Language:
english
Pages:
8
DOI:
10.1016/0168-583x(87)90898-6
File:
PDF, 449 KB
english, 1987