Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
Thermal-wave measurements of ion implanted silicon
Bradford J. Kirby, Lawrence A. Larson, Ru-Yu LiangVolume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90901-3
File:
PDF, 240 KB
english, 1987