Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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An apparatus for combined vapor deposition and ion implantation to modify the surface properties of metals
B. Margesin, F. Giacomozzi, L. Guzman, G. Lazzari, V. ZaniniVolume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90905-0
File:
PDF, 1.34 MB
english, 1987