Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Equipment for ion beam assisted deposition
G.K. Wolf, K. Zucholi, M. Barth, W. EnsingerVolume:
21
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(87)90906-2
File:
PDF, 1.71 MB
english, 1987