Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Electron beam doping in substrates of overlayer Si/substrate GaAs, SiGaAsP and evaporated GeSi
Takao Wada, Michihiko TakedaVolume:
21
Year:
1987
Language:
english
Pages:
2
DOI:
10.1016/0168-583x(87)90907-4
File:
PDF, 130 KB
english, 1987