Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Deposition of boron nitride thin films by ion beam assisted deposition
R.J. Bricault, P. Sioshansi, S.N. BunkerVolume:
21
Year:
1987
Language:
english
Pages:
2
DOI:
10.1016/0168-583x(87)90912-8
File:
PDF, 141 KB
english, 1987