Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Development of surface topology during ion sputtering of silicon
L. Augulis, B. Jasiulionis, L. PranevičiusVolume:
21
Year:
1987
Language:
english
Pages:
2
DOI:
10.1016/0168-583x(87)90919-0
File:
PDF, 573 KB
english, 1987