Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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A new VLSI compatible rapid thermal processing system
D. Aitken, S. Mehta, N. Parisi, C.J. Russo, V. SchwartzVolume:
21
Year:
1987
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(87)90923-2
File:
PDF, 1.78 MB
english, 1987