Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 21; Iss. 1-4
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Process control of titanium silicide formation using rapid thermal processing
A. Kermani, T. Debolske, J. Crowley, T. StultzVolume:
21
Year:
1987
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(87)90926-8
File:
PDF, 255 KB
english, 1987