Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1988 Vol. 32; Iss. 1-4
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Ion implantation and annealing of crystalline oxides and ceramic materials
C.W. White, L.A. Boatner, P.S. Sklad, C.J. McHargue, J. Rankin, G.C. Farlow, M.J. AzizVolume:
32
Year:
1988
Language:
english
Pages:
12
DOI:
10.1016/0168-583x(88)90172-3
File:
PDF, 1.19 MB
english, 1988