Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1988 Vol. 32; Iss. 1-4
Thermal stability and Bi diffusion in the implanted AZ111 photoresist
R.B. Guimarães, L. Amaral, R.P. Livi, J.P. De Souza, M. Behar, F.C. ZawislakVolume:
32
Year:
1988
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(88)90248-0
File:
PDF, 284 KB
english, 1988