Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1988 Vol. 33; Iss. 1-4
Measurement of differential sputtering yields by laser fluorescence spectroscopy
Y. Matsuda, K. Yamaguchi, T. Kajiwara, K. Muraoka, M. Akazaki, C. Honda, T. Okada, M. Maeda, Y. Yamamura, E. Kawatoh, J. FujitaVolume:
33
Year:
1988
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(88)90618-0
File:
PDF, 391 KB
english, 1988