Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1988 Vol. 33; Iss. 1-4
Compositional analysis of semiconductor heterojunctions: Structure of SiC (thin buffer layer)/Si(100) system
M. Iwami, M. Kusaka, M. Hirai, H. Nakamura, T. Koshikawa, K. Shibahara, H. MatsunamiVolume:
33
Year:
1988
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(88)90643-x
File:
PDF, 312 KB
english, 1988