Radiation effects of ion beams on polystyrene resist films

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1988 Vol. 33; Iss. 1-4

Radiation effects of ion beams on polystyrene resist films

Yasushi Aoki, Noriyuki Kouchi, Hiromi Shibata, Seiichi Tagawa, Yoneho Tabata, Saburo Imamura
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Volume:
33
Year:
1988
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(88)90686-6
File:
PDF, 331 KB
english, 1988
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