Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1988 Vol. 33; Iss. 1-4
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Surface and interface analysis by nonresonant multiphoton ionization of sputtered neutrals
Joan B. Pallix, Keith T. Gillen, Christopher H. BeckerVolume:
33
Year:
1988
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(88)90709-4
File:
PDF, 690 KB
english, 1988