Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 37-38; Iss. none
Ion beam deposition in materials research
R.A. Zuhr, S.J. Pennycook, T.S. Noggle, N. Herbots, T.E. Haynes, B.R. AppletonVolume:
37-38
Year:
1989
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(89)90129-8
File:
PDF, 812 KB
english, 1989