A reaction sputtering type rf ion source for solid elements

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1989 Vol. 37-38; Iss. none

A reaction sputtering type rf ion source for solid elements

Cheng Shichang, Fu Dejun, Zhang Hui, Pan Xianzheng
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Volume:
37-38
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90152-3
File:
PDF, 305 KB
english, 1989
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