The effect of a magnetic field on the plasma...

The effect of a magnetic field on the plasma characteristics of a sputter-type hf ion source

Mutsuo Yamashita
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Volume:
37-38
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90167-5
File:
PDF, 314 KB
english, 1989
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