Development of high current metal ion beam source

Development of high current metal ion beam source

Hiroshi Inami, Fumio Fukumaru, Yutaka Inouchi, Daisuke Sato, Kazuhiko Tanaka, Kouzi Matsunaga
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Volume:
37-38
Year:
1989
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(89)90168-7
File:
PDF, 309 KB
english, 1989
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