Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 37-38; Iss. none
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An RFQ accelerator system for MeV ion implantation
Akira Hirakimoto, Hiroaki Nakanishi, Hiroyuki Fujita, Ikuo Konishi, Shinji Nagamachi, Hiroshi Nakahara, Masatoshi AsariVolume:
37-38
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(89)90179-1
File:
PDF, 449 KB
english, 1989