Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 37-38; Iss. none
Optimisation of SIMOX structures formed by ion beam synthesis
K.J. Reeson, K.G. Stephens, P.L.F. HemmentVolume:
37-38
Year:
1989
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(89)90188-2
File:
PDF, 600 KB
english, 1989