Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 37-38; Iss. none
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Nondestructive assessment of SIMOX substrates
E.F. Steigmeier, G. Harbeke, K.J. Reeson, P.L.F. Hemment, A.K. RobinsonVolume:
37-38
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90191-2
File:
PDF, 379 KB
english, 1989