Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 37-38; Iss. none
Dynamic implantation model of ion beam enhanced deposition
Yang Genqing, Jiang Binyao, Zhou Wei, Liu Xianghuai, Zou ShichangVolume:
37-38
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(89)90217-6
File:
PDF, 372 KB
english, 1989