New method of solid state wafer cooling in the Extrion 1000...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1989 Vol. 37-38; Iss. none

New method of solid state wafer cooling in the Extrion 1000 high current ion implantation system

Eric Mears, Edward Evans, Keith Pierce, Reuel Liebert
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
37-38
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90224-3
File:
PDF, 284 KB
english, 1989
Conversion to is in progress
Conversion to is failed