Dose control system for the Extrion 1000 ion implantation...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1989 Vol. 37-38; Iss. none

Dose control system for the Extrion 1000 ion implantation system

Reuel B. Liebert, Shu Satoh, Adrian Delforge, Edward Evans
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Volume:
37-38
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(89)90225-5
File:
PDF, 449 KB
english, 1989
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