Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 37-38; Iss. none
Control of surface charging during high current ion implantation
M.I. Current, A. Bhattacharyya, M. KhidVolume:
37-38
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90245-0
File:
PDF, 356 KB
english, 1989