Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 37-38; Iss. none
Wafer chargeup study on the PR-80 high current ion implantation machine
N. Nagai, T. Kawai, M. Naito, Y. Nishigami, H. Fujisawa, K. NishikawaVolume:
37-38
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90249-8
File:
PDF, 327 KB
english, 1989