Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 37-38; Iss. none
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Production high-energy ion implanters with milliampere beam capabilities
P. Boisseau, A. Dart, A.S. Denholm, H.F. Glavish, B. Libby, G. SimcoxVolume:
37-38
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(89)90254-1
File:
PDF, 410 KB
english, 1989