Effect of incident angles of N implantation on...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1989 Vol. 37-38; Iss. none

Effect of incident angles of N implantation on recrystallization of AlNx thin films

Kenzo Kobayashi, Susumu Namba, Takanobu Fujihana, Yisheng Dai, Masaya Iwaki
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Volume:
37-38
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90279-6
File:
PDF, 334 KB
english, 1989
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