Deposition of wide-area diamond films in magneto-microwave...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1989 Vol. 37-38; Iss. none

Deposition of wide-area diamond films in magneto-microwave plasma

Akio Hiraki, Hiroshi Kawarada, King-Sheng Mar, Yoshihiro Yokota, Jin Wei, Jun-ichi Suzuki
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Volume:
37-38
Year:
1989
Language:
english
Pages:
8
DOI:
10.1016/0168-583x(89)90301-7
File:
PDF, 766 KB
english, 1989
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