Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 37-38; Iss. none
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Development of a high deposition rate machine by ion beam sputtering
Isao Hashimoto, Keiji Arimatsu, Yasushi Ishikawa, Shigeru Tanaka, Tetsuo GejyoVolume:
37-38
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90309-1
File:
PDF, 331 KB
english, 1989