Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 37-38; Iss. none
Ta2O5 film formation by double ion beam method
Teruhito Ohnishi, Yoshikazu Yoshida, Yuichi Hirofuji, Hiroshi IwasakiVolume:
37-38
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90312-1
File:
PDF, 327 KB
english, 1989