New equipment for preparation of films by assisted...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1989 Vol. 37-38; Iss. none

New equipment for preparation of films by assisted deposition

Xianzheng Pan, Xiangjun Fan, Feng Pan, Mingzhu Zhang, Zili Zhu
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Volume:
37-38
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90314-5
File:
PDF, 476 KB
english, 1989
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