Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 37-38; Iss. none
Grain boundary diffusion control of Cu films prepared by the ICB technique
Gikan H. Takaoka, Katsushi Fujita, Junzo Ishikawa, Toshinori TakagiVolume:
37-38
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90320-0
File:
PDF, 367 KB
english, 1989