Effect of ion bombardment on the structure of sputtered...

Effect of ion bombardment on the structure of sputtered TiN films

J. Musil, V. Poulek, S. Kadlec, J. Vyskočil, V. Valvoda, R. Černý, R. Kužel Jr.
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Volume:
37-38
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(89)90323-6
File:
PDF, 405 KB
english, 1989
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