Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 36; Iss. 4
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Medium energy ion scattering analysis of low energy chlorine ion bombarded gallium-arsenide
Kevin G. Orrman-Rossiter, Rashpal S. Baht, Ranjan Badheka, Mike Wadsworth, D.G. ArmourVolume:
36
Year:
1989
Language:
english
Pages:
9
DOI:
10.1016/0168-583x(89)90348-0
File:
PDF, 794 KB
english, 1989