Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 42; Iss. 3
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Low energy chlorine-ion interaction on GaAs(001)
Kevin G. Orrman-Rossiter, D.G. ArmourVolume:
42
Year:
1989
Language:
english
Pages:
8
DOI:
10.1016/0168-583x(89)90444-8
File:
PDF, 959 KB
english, 1989